A simple method for calculating the number of atoms in ion implanted samples from the RBS yield


Can N., Belik H.

Mathematical and Computational Applications, vol.9, no.1, pp.91-99, 2004 (Scopus, TRDizin) identifier

  • Publication Type: Article / Article
  • Volume: 9 Issue: 1
  • Publication Date: 2004
  • Doi Number: 10.3390/mca9010091
  • Journal Name: Mathematical and Computational Applications
  • Journal Indexes: Scopus, TR DİZİN (ULAKBİM)
  • Page Numbers: pp.91-99
  • Keywords: Elastic backscattering, RBS, Stopping Power
  • Manisa Celal Bayar University Affiliated: Yes

Abstract

A simple method that computes the number of atoms in implanted samples from the integral of the elastic backscattering yield, using a pocket calculator, is represented. The energy dependence E2, of the Rutherford law and the screening of the nuclear charge by the electron cloud is considered. The method is based on the assumption that the stopping power is a linearly decreasing function of the energy in the range from 1.4 MeV to 2MeV. The total yield can be integrated analytically, and the number of atoms in the sample can then be ascertained by an iteration procedure that can be accomplished with a scientific pocket calculator. The results obtained are compared with the values obtained using the computer simulation code for RBS spectra RUMP.